Technical Data:

技术参数：

Shape: Horizontal design.

外形：水平设计

Chamber dimensions: ? = 1，7 m， Length = 3，5 m.

腔体尺寸：? = 1，7 m， Length = 3，5 m.

Vacuum better than: 1x10-5 mbar.

真空度：<1x10-5 mbar.

Temperature range: from –55oC to +120oC.

温度范围：–55oC to +120oC

Heating/Cooling speed at the shrouds: 1oC/min.

导热层加热冷却速率： 1oC/min.

Shroud temperature uniformity: 2oC.

导热层温度均匀性： 2oC

Working surface: optical table.

工作台面：光学桌子

特殊设计：

Table supported on a seismic block， isolated from chamber supports.

工作桌面区别于腔体，单独固定在一个防震区块上。

4 shroud zones with independent temperature control.

四个区域拥有单独的温度控制模块。

TCU and vacuum pumps are in separated machinery room.

温度控制模块和真空泵在不同的房间