分子泵(Turbo Molecular Pump)主要用于为制造太阳能电池和半导体提供不可或缺的真空环境。岛津分子泵有着世界高水准的排气能力，并且有一系列的产品可以满足不同的太阳能电池模组和硅晶片的工艺需求，随着市场的扩大，我们开发的脚步也从未停止。

• 超大的排气流量
• 优异的耐腐蚀性能
• 外形紧凑的控制器
• 应对生成物对策（选购件）
• 各种监测功能
• 网络接入对应
• 泵转速可调
• 消费电力削减
• 适用于各种规格
• 无需调整（泵电缆更换时，无需对控制器再次调整）
• 无需蓄电池

Maximum pumping flowrate

High pumping throughput is achieved with a compact body.

Excellent corrosion resistance

Resistant to corrosive gas because dispersed plating is used on the rotor (TMP-4203LMC, TMP-3403LMC). Dispersed plating with an excellent heat release characteristic prevents overheat of the rotor caused by high pumping throughput.
The surface of the rotor of the TMP-2203LMC and TMP-1303LMC is nickel-plated to protect against corrosive gas.

Compact power supply unit

49 % smaller and 50 % lighter as compared to Shimadzu's previous models

Measures against reaction products (optional)

Adding a function for controlling the heater and cooling water to the pump allows it to be kept at a high temperature and prevents the accumulation of reaction products inside it. The temperature controller is built into the compact power supply unit.

Various monitoring functions

LCD on the front panel displays the current, pumping speed, unbalance amount, errors, and other information. Equipped with a maintenance call timer.
Equipped with a RS-232C port on the front panel so that operation information can be loaded on a computer while the pump is operating. You can find abnormalities (increase of back pressure due to an adhered reaction product, etc.) in early stages if you compare the condition with the normal condition. This helps to protect the system from problems and keep it in good condition.

Network connection enabled

Equipped with RS-232C and RS-485 compliant serial communication ports, which enables operations to start/stop pumps, monitor operation status, and load operation history. Up to 32 pumps can be monitored using a single computer.
Using optional monitor software, multiple pumps can be monitored simultaneously.

Variable pump speed

The pump speed can be set within a range from 25 to 100 % to adjust the pump's throughput. Speed setting can be applied to the adjustment of chamber pressure. Conductance valves can be reduced when used under given conditions.

Reduced power consumption • Compliant with major standards

• CE marking, TÜV

• NRTL (UL61010A-1)

• SEMI S2

• SEMI F47

• SEMI E74

Tuning-free

Readjustment of the power supply unit is unnecessary during pump cable replacement.

Battery-less

In the case of a power failure, magnetic levitation is maintained using regenerated power, thus reducing wear of the touchdown bearing.