光谱检测分析仪-LOS激光干涉仪-光傲科技股份有限公司-产品详情

LOS激光干涉仪

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光傲科技股份有限公司

美国

产品规格型号

参考报价：

面议

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522

产品介绍

LOS双频激光干涉仪是以波长作为标准对位移和几何量进行度量的仪器，LOS采用了自制的稳频激光作为激光光源，精度可达到n m量级。LOS可以在很远的距离达到很高的测试精度和解析度。

LOS系统应用范围广，除了可用于长度的精密测量外，配上适当的附件还可测量角度、直线度、平面度、振动距离及速度等等。

该公司同时提供基于CCD的几何度量系统，使得测量更加灵活、快速，并保证精度。

主要特点：

3年内激光波长精度不低于 0，02 ppm.
激光10年内满足测试要求
激光无需采用任何稳频措施（如加热）
无需预热，开机即可开始测量（一般激光需要预热，使得激光波长稳定下来）
激光波长精度不受反射激光影响！（一般的激光干涉仪反射可导致严重的测量误差）
提供激光气体更换服务，即10年后，可以更换激光管的气体，达到新激光管的性能（拥有自己的**HeNe激光生产技术）
空气和材料温度传感器等均采用无线连接，安装和使用简单易用。
通讯界面可以选 Ethernet， USB and WiFi，并自带独立显示器
标准质保期 36 个月（3年）

测量参数：

位置测量 Position
速度 Velocity
加速度 Acceleration
线性，准直度 Straightness
矩形 Squareness
角度 Angles
平面面型 Flatness
平行度 Parallelism

应用领域：

	Machinery机械行业
	机床校正和补偿 Machine tool calibration and compensation 三坐标测量机校正 Calibration of CMMs 测量仪器校正 Calibration of measuring devices 产品质量控制 Production quality control 几何尺寸测量 Measurement of dimensions 机床调整，对中 Adjustment and alignment of machines and devices 机床维护 Maintenance of machines 高精度机床内部Internal measurement system for high-accuracy machines 螺杆质量测试 Lead screw verification 动态测量 Dynamic measurement
	航空和汽车工业 Aircraft and automobile industry
	大尺寸工件高精度测量 Measurement and checking of large dimensions
	计量校正 Metrology and calibration institutes
	作为长度标准，具有不同的应用 The system is used in various applications as a length standard
	微电子行业 Microelectronic industry
	The internal multiaxis system for high precision positioning mechanisms with both open and closed control loop， e.g. - step and repeat cameras - testing of semiconductor wafers - laser writing machines
	Other applications
	任何需要对位置和几何参数精密测量的行业和应用，以及研发、科学研究等领域

动态测试功能：

LOS 双频激光干涉仪可以进行动态测试，采样频率可达500Hz，完成测量后，即可进行数据处理，可以按照需要的格式进行显示和打印。 WinScope软件除了可以提供测试的数值外，还有许多便利的功能，如，触发模式设置，计算和统计功能， FFT快速傅里叶变换算法，光谱分析，强大的图形显示等.

位移，速度、加速度测试

阅读: 1806

Standard LOS System configuration is designed to measure position， velocity and acceleration. A typical application is the calibration of positional accuracy of CNC machine tools. In this measurement the difference between the desired and actual position of the machine's moving part is evaluated. The method of measurement and evaluation corresponds to international standards (ISO 230-2， VDI/DGQ 2617，3441， NMTBA). The whole measurement process and printing of protocol is controlled by the computer programme and is fully automatic.

Software Compensation of Machine Tool Positional Errors

The measured positional errors can be transferred as correction data on line into the machine tool control system immediately after measurement. Considerable improvement of positional accuracy can thus be achieved in a minimum time. The producer delivers software modules which compensate for various control systems (SIEMENS， HEIDENHEIN， DYNAPATH， SELCA， YASNAC， FANUC， ACRAMATIC).

Further Applications

Positional accuracy of a co-ordinate measurement machine can be calibrated in a similar way (VDI 2617 standard). The LOS system is used also for the calibration of dimensional gauges. Laser systems cannot be replaced when precision measurement of long distances (up to 40 meters) is required.

Technical Specifications

Measurement range		0 - 40 m
Resolution		1.25 nm (lambda/512)
Accuracy in vacuum		10^-7 x measured length ± resolution ± 0.6 nm
Accuracy with the LS70 Comp. unit		(0 - 40°C ): 1µ/m
Max. velocity		1 m/s - PC card LS 30.11 2 m/s - PC card LS 30.12

线性度 Straightness 测量

阅读: 1808

Errors in straightness of movement and in parallelity of axes can be measured by the LS 127ST set. The laser beam is split in the LS 127.1 differential beamsplitter into two parallel beams. After going through the optical wedge LS 127.2 the beams diverge at a small angle. The optical wedge functions as the straightness sensor. Reflector LS 127.3， formed by two inclined extremely precise plane mirrors， returns the beams back into the differential beamsplitter. The axis of the mirror reflector defines the straight line reference. This straightness measurement method is less sensitive to air turbulence disturbances than other methods. This straightness set also shows low sensitivity to possible inclinations of the straightness sensor during its movement at measurement.

The standard configuration for position measurement except the LS 20.1， LS 21.1， LS 70， LS 90.1， LS 90.3 is used for straightness measurement. The optical parts are fixed by the set of holders LS 51.

技术参数

Longitudinal measurement range		3 m (or according to requirements)
Transverse measurement range		±3 mm
Measurement Accuracy		(± 0，005 X ±0，5 ±0，3 M² ) µm X - measured deviation in µm M - measured longitudinal distance in m

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